[A-9-2] Direct Observation of Initial Stage of Oxidation on Si(001) Surface by Scanning Tunneling Microscopy

K. Miki, Y. Kudo, M. Murata, K. Yamabe (1.Electrotechnical Laboratory, 2.Institute of Applied Physics, Tsukuba University)

https://doi.org/10.7567/SSDM.1999.A-9-2