[A-9-2] Direct Observation of Initial Stage of Oxidation on Si(001) Surface by Scanning Tunneling Microscopy

K. Miki、Y. Kudo、M. Murata、K. Yamabe (1.Electrotechnical Laboratory、2.Institute of Applied Physics, Tsukuba University)

https://doi.org/10.7567/SSDM.1999.A-9-2