[B-1-4] The Impact of Nitrogen Implantation at LDD(NIL) on Deep Sub-Micron CMOS Devices

Sung-Kwon Hong, Sang-Gi Lee, Jae-Gyung Ahn, Dae-Gwan Kang, Jeong-Mo Hwang (1.LG Semicon Co., Ltd, R&D Division)

https://doi.org/10.7567/SSDM.1999.B-1-4