[B-10-1] Evaluation of SOI Wafer Quality and Technological Issues to be Solved

Makoto Yoshimi, Shigeto Maegawa, Toshiaki Tsuchiya, Mizuho Morita, Kiyoshi Demizu, Tadahiro Ohmi (1.SOI-Epi Committee, UCS (Ultra Clean Society), 2.Toshiba Corporation, 3.Mitsubishi Electric, 4.Shimane Univ., 5.Osaka Univ., 6.Shin'etsu Handotai, 7.Tohoku Univ.)

https://doi.org/10.7567/SSDM.1999.B-10-1