[B-10-1] Evaluation of SOI Wafer Quality and Technological Issues to be Solved

Makoto Yoshimi、Shigeto Maegawa、Toshiaki Tsuchiya、Mizuho Morita、Kiyoshi Demizu、Tadahiro Ohmi (1.SOI-Epi Committee, UCS (Ultra Clean Society)、2.Toshiba Corporation、3.Mitsubishi Electric、4.Shimane Univ.、5.Osaka Univ.、6.Shin'etsu Handotai、7.Tohoku Univ.)

https://doi.org/10.7567/SSDM.1999.B-10-1