[B-10-2] Water Jet Splitting of Thin Porous Si for ELTRAN

K. Ohmi、K. Sakaguchi、K. Yanagita、H. Kurisu、H. Suzuki、T. Yonehara (1.ELTRAN Project, Canon Inc.)

https://doi.org/10.7567/SSDM.1999.B-10-2