[B-10-3] Creation of Bonded SOI Substrates with CZ Silicon Higher than 1000 Ωcm in Resistivity

Takao Abe、Shigeru Saito、Ken Aihara、Weifeng Qu、Yoshinori Hayamizu、Masanori Kimura、Kiyoshi Mitani (1.Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.)

https://doi.org/10.7567/SSDM.1999.B-10-3