[B-12-3] PE-CVD of Thermally Stable Low-k IMD Films Using Low-GWPC5F8

Tatsuru Shirafuji, Yasuaki Hayashi, Shigehiro Nishiono (1.Department of Electronics and Information Science, Kyoto Institute of Technology)

https://doi.org/10.7567/SSDM.1999.B-12-3