[B-15-4] Photoluminescence of Low-Energy B ± Implanted Silicon under Ultraviolet Light Excitation

Koichi Terashima、Kousuke Miyoshi、Michio Tajima (1.ULSI Device Development Laboratory, NEC Corporation、2.Institute of Space and Astronautical Science)

https://doi.org/10.7567/SSDM.1999.B-15-4