[B-7-3] Low Pressure High Speed Spin Dryer for Realizing Water Mark Free Surface

Hisashi Okuchi, Hiroshi Tomita, Soichi Nadahara, Katsuya Okumura, Kazuaki Maeda, Haruko Ohno, Manabu Tsujimura, Yusuke muraoka (1.Process Engineering Lab., Toshiba Corp. Semiconductor Company, 2.Precision Machinery Group, Ebara Corp., 3.Dainippon Screen MFG. Co. Ltd.)

https://doi.org/10.7567/SSDM.1999.B-7-3