The Japan Society of Applied Physics

[C-1-3] Investigation of Growth Process of GaN Film on Sapphire by Computational Chemistry

Takayuki Onozu、Yusaku Inaba、Seiichi Takami、Momoji Kubo、Akira Miyamoto、Yasushi Iyechika、Takayoshi Maeda (1.Department of Materials Chemistry, Graduate School of Engineering, Tohoku University、2.Tsukuba Research Laboratory, Sumitomo Chemical Co. Ltd.)

https://doi.org/10.7567/SSDM.1999.C-1-3