Investigation of Growth Process of GaN Film on Sapphire by Computational Chemistry

Takayuki Onozu; Yusaku Inaba; Seiichi Takami; Momoji Kubo; Akira Miyamoto; Yasushi Iyechika; Takayoshi Maeda

doi:https://doi.org/10.7567/SSDM.1999.C-1-3

[C-1-3] Investigation of Growth Process of GaN Film on Sapphire by Computational Chemistry

Takayuki Onozu、Yusaku Inaba、Seiichi Takami、Momoji Kubo、Akira Miyamoto、Yasushi Iyechika、Takayoshi Maeda (1.Department of Materials Chemistry, Graduate School of Engineering, Tohoku University、2.Tsukuba Research Laboratory, Sumitomo Chemical Co. Ltd.)

https://doi.org/10.7567/SSDM.1999.C-1-3

1999 International Conference on Solid State Devices and Materials

[C-1-3] Investigation of Growth Process of GaN Film on Sapphire by Computational Chemistry