[C-2-3] Hydride Vapor Phase Epitaxy of GaN on NdGaO3 Substrate and Realization of Freestanding GaN Wafers with 2-inch Scale
Akihiro WAKAHARA、Takenori YAMAMOTO、Kouji ISHIO、Akira YOSHIDA、Youji SEKI、Osamu ODA
(1.Dept. of Electrical and Electronic Eng., Toyohashi Univ. of Technology、2.Central Research Lab., Japan Energy Co.)
https://doi.org/10.7567/SSDM.1999.C-2-3