[C-2-3] Hydride Vapor Phase Epitaxy of GaN on NdGaO3 Substrate and Realization of Freestanding GaN Wafers with 2-inch Scale

Akihiro WAKAHARA, Takenori YAMAMOTO, Kouji ISHIO, Akira YOSHIDA, Youji SEKI, Osamu ODA (1.Dept. of Electrical and Electronic Eng., Toyohashi Univ. of Technology, 2.Central Research Lab., Japan Energy Co.)

https://doi.org/10.7567/SSDM.1999.C-2-3