The Japan Society of Applied Physics

[C-6-3] Low Resistance and Thermally Stable Pt/W/Au Ohmic Contacts to P-Type GaN

Hwa-Sub Oh、Ja-Soon Jang、Han-Ki Kim、Seong-Ju Park、Tae-Yeon Seong (1.Department of Materials Science and Engineering Kwangju Institute of Science and Technology (K-JIST))

https://doi.org/10.7567/SSDM.1999.C-6-3