[C-7-3] 0.25 μm FeRAM with CMVP (Capacitor-on-Metal/Via-Stacked-Plug) Memory Cell

Kazushi Amanuma, Sota Kobayashi, Toru Tatsumi, Yukihiko Maejima, Hiromitsu Hada, Junichi Yamada, Tohru Miwa, Hiroki Koike, Hideo Toyoshima, Takemitsu Kunio (1.Silicon Systems Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1999.C-7-3