[C-7-3] 0.25 μm FeRAM with CMVP (Capacitor-on-Metal/Via-Stacked-Plug) Memory Cell

Kazushi Amanuma、Sota Kobayashi、Toru Tatsumi、Yukihiko Maejima、Hiromitsu Hada、Junichi Yamada、Tohru Miwa、Hiroki Koike、Hideo Toyoshima、Takemitsu Kunio (1.Silicon Systems Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1999.C-7-3