[C-9-1] Effects of Encapsulating Barrier Layer on Ferroelectric Properties of Ir/IrO2/PZT/Pt/IrO2 Capacitor

Yong Tak Lee, Hag-Ju Cho, Sang Jeong Oh, Suk Ho Joo, Joong Jae Lee, Kyu Mann Lee, Soon Oh Park, Young Wook Park, Sang In Lee (1.Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd)

https://doi.org/10.7567/SSDM.1999.C-9-1