[C-9-4] Low Voltage Operation of the Ferroelectric Pb(Zr, Ti)O3 Capacitors Derived by Sol-Gel Method
Yoshikazu Fujimori、Toshiyuki Takeda、Takashi Nakamura、Hidemi Takasu
(1.Device Technology Div., Semiconductor Research and Development Headquarters, ROHM CO., LTD.)
https://doi.org/10.7567/SSDM.1999.C-9-4