[D-1-4] Sub-μm Silicon SETs on Self-Undulated Hyper-Thin SOI Films

K. Uchida, J. Koga, R. Ohba, S. Takagi, A. Toriumi (1.Advanced LSI Technology Laboratory, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1999.D-1-4