[D-13-2] Temperature Dependence of Si Delta-Doping on GaAs Singular and Vicinal Surfaces in Metalorganic Vapor Phase Epitaxy

Chiharu Tazaki, Masashi Akabori, Junichi Motohisa, Takashi Fukui (1.Research Center for Interface Quantum Electronics, Hokkaido University)

https://doi.org/10.7567/SSDM.1999.D-13-2