(AlGa)As Composition Profile Analysis of Trenches Overgrown with MOVPE

Lars Hofmann; Dirk Rudloff; Ingrid Rechenberg; Jurgen Christen

doi:https://doi.org/10.7567/SSDM.1999.D-14-3

1999 International Conference on Solid State Devices and Materials

1999年9月21日〜 1999年9月24日
Nihon Toshi Center Kaikan, Tokyo, Japan

[D-14-3] (AlGa)As Composition Profile Analysis of Trenches Overgrown with MOVPE

Lars Hofmann、Dirk Rudloff、Ingrid Rechenberg、Jurgen Christen (1.Ferdinand-Braun-Institut fur Hochstfrequenztechnik、2.Otto-von-Guericke-Universitat Magdeburg)

https://doi.org/10.7567/SSDM.1999.D-14-3

▲