[D-14-3] (AlGa)As Composition Profile Analysis of Trenches Overgrown with MOVPE

Lars Hofmann, Dirk Rudloff, Ingrid Rechenberg, Jurgen Christen (1.Ferdinand-Braun-Institut fur Hochstfrequenztechnik, 2.Otto-von-Guericke-Universitat Magdeburg)

https://doi.org/10.7567/SSDM.1999.D-14-3