[D-15-3] Determination of the Facet Index in Area Selective Epitaxy of GaAs

Hiroaki Kuriyama, Masahiro Ito, Keita Suzuki, Yoshiji Horikoshi (1.School of Science and Engineering, Waseda University, 2.Kagami Memorial Laboratory, for Materials Science and Technology, Waseda University)

https://doi.org/10.7567/SSDM.1999.D-15-3