[E-10-2] Hybridly Integrated PLC LD Modules Using Pedestal Structure Reach-through Bonding

Terukazu Naruse, Hidehiko Nakata, Haruhiko Tabuchi, Kazuhiro Tanaka (1.FUJITSU LABORATORIES LTD.)

https://doi.org/10.7567/SSDM.1999.E-10-2