[E-10-2] Hybridly Integrated PLC LD Modules Using Pedestal Structure Reach-through Bonding

Terukazu Naruse、Hidehiko Nakata、Haruhiko Tabuchi、Kazuhiro Tanaka (1.FUJITSU LABORATORIES LTD.)

https://doi.org/10.7567/SSDM.1999.E-10-2