The Japan Society of Applied Physics

[E-14-3] Magnetic Thin-Film Inductor for rf Integrated Circuits

M. Yamaguchi、K. Suezawa、M. Baba、Y. Takahashi、K. I. Arai、S. Kikuchi、Y. Shimada、S. Tanabe、K. Ito (1.Research Institute of Electrical Communication, Tohoku University、2.Faculty of Engineering, Tohoku Gakuin University、3.Research Institute of Scientific Instrumentation, Tohoku University、4.ATC, Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1999.E-14-3