[E-14-4] Film Bulk Acoustic Resonator Fabrication for RF Filter Applications
Sang-Hyun Park, Byeng-Chul Seo, Hee-Dae Park, Giwan Yoon
(1.Information and Communications University, 2.Research Center, Sang Shin Electric Co. Ltd.)
https://doi.org/10.7567/SSDM.1999.E-14-4