The Japan Society of Applied Physics

[E-14-4] Film Bulk Acoustic Resonator Fabrication for RF Filter Applications

Sang-Hyun Park, Byeng-Chul Seo, Hee-Dae Park, Giwan Yoon (1.Information and Communications University, 2.Research Center, Sang Shin Electric Co. Ltd.)

https://doi.org/10.7567/SSDM.1999.E-14-4