[E-14-4] Film Bulk Acoustic Resonator Fabrication for RF Filter Applications
Sang-Hyun Park、Byeng-Chul Seo、Hee-Dae Park、Giwan Yoon
(1.Information and Communications University、2.Research Center, Sang Shin Electric Co. Ltd.)
https://doi.org/10.7567/SSDM.1999.E-14-4
