Film Bulk Acoustic Resonator Fabrication for RF Filter Applications

Sang-Hyun Park; Byeng-Chul Seo; Hee-Dae Park; Giwan Yoon

doi:https://doi.org/10.7567/SSDM.1999.E-14-4

1999 International Conference on Solid State Devices and Materials

Sep 21, 1999 - Sep 24, 1999
Nihon Toshi Center Kaikan, Tokyo, Japan

[E-14-4] Film Bulk Acoustic Resonator Fabrication for RF Filter Applications

Sang-Hyun Park, Byeng-Chul Seo, Hee-Dae Park, Giwan Yoon (1.Information and Communications University, 2.Research Center, Sang Shin Electric Co. Ltd.)

https://doi.org/10.7567/SSDM.1999.E-14-4

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