High Spatial Resolution Magnetic Field Measurements Using Thin-Film Shielded Loop Coil

M. Yamaguchi; S. Yabukami; H. Yurugi; K. I. Arai; N. Masuda; N. Tamaki; H. Tohya

doi:https://doi.org/10.7567/SSDM.1999.E-16-2

1999 International Conference on Solid State Devices and Materials

1999年9月21日〜 1999年9月24日
Nihon Toshi Center Kaikan, Tokyo, Japan

[E-16-2] High Spatial Resolution Magnetic Field Measurements Using Thin-Film Shielded Loop Coil

M. Yamaguchi、S. Yabukami、H. Yurugi、K. I. Arai、N. Masuda、N. Tamaki、H. Tohya (1.Research Institute of Electrical Communication, Tohoku Univ.、2.EMC Engineering Center, NEC Co.)

https://doi.org/10.7567/SSDM.1999.E-16-2

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