[A-1-4] A Study on Mechanism of Chemical Mechanical Polishing on Al and Cu Surfaces Employing In-situ Infrared Spectroscopy

Hiroki Ogawa, Yusuke Tokuyama, Michihiko Yanagisawa, Jun Kikuchi, Yasuhiro Horiike (1.Department of Materials Science, School of Engineering, University of Tokyo, 2.Speedfam-IPEC Co., Ltd., 3.Axiomatec Inc.)

https://doi.org/10.7567/SSDM.2000.A-1-4