[A-1-4] A Study on Mechanism of Chemical Mechanical Polishing on Al and Cu Surfaces Employing In-situ Infrared Spectroscopy

Hiroki Ogawa、Yusuke Tokuyama、Michihiko Yanagisawa、Jun Kikuchi、Yasuhiro Horiike (1.Department of Materials Science, School of Engineering, University of Tokyo、2.Speedfam-IPEC Co., Ltd.、3.Axiomatec Inc.)

https://doi.org/10.7567/SSDM.2000.A-1-4