[A-1-7] Novel Nozzle-Scan Coating Method for Low-k Films

R. Nakata, N. Yamada, A. Kajita, S. Ito, K. Okumura, T. Kitano, M. Morikawa, K. Takeshita, Y. Esaki, M. Akimoto (1.PROCESS & MANUFACTURING ENGINEERING CENTER, TOSHIBA CORPORATION, 2.SYSTEM LSI DEVELOPMENT CENTER, TOSHIBA CORPORATION, 3.R&D Dept., Tokyo Electron Kyushu Ltd.)

https://doi.org/10.7567/SSDM.2000.A-1-7