[A-1-7] Novel Nozzle-Scan Coating Method for Low-k Films

R. Nakata、N. Yamada、A. Kajita、S. Ito、K. Okumura、T. Kitano、M. Morikawa、K. Takeshita、Y. Esaki、M. Akimoto (1.PROCESS & MANUFACTURING ENGINEERING CENTER, TOSHIBA CORPORATION、2.SYSTEM LSI DEVELOPMENT CENTER, TOSHIBA CORPORATION、3.R&D Dept., Tokyo Electron Kyushu Ltd.)

https://doi.org/10.7567/SSDM.2000.A-1-7