[A-2-5] Dielectric Breakdown and Light Emission in Copper Damascene Structure under Bias-Temperature Stress

Ken-ichi Takeda、Kenji Hinode、Junji Noguchi、Hizuru Yamaguchi (1.Central Research Laboratory, Hitachi LTD.、2.Device Development Center, Hitachi LTD.)

https://doi.org/10.7567/SSDM.2000.A-2-5