[A-3-2] Inductive-Coupled RF Magnetron Plasma Deposition of (Ba, Sr)TiO3 for Decoupling Capacitors

N. Fujiwara, T. Kikkawa, S. Miyazaki, F. Nishiyama, M. Hirose (1.Research Center for Nanodevices and Systems, Department of Electrical Engineering, and Radiation Research Facility, Hiroshima University)

https://doi.org/10.7567/SSDM.2000.A-3-2