[A-3-3] Gas Phase Reactions in the MOCVD of (Ba, Sr)TiO3 Films: A Study by Microdischarge Optical Emission Spectroscopy

Shun Momose, Toshihiro Nakamura, Kunihide Tachibana (1.Department of Electronic Science and Engineering, Kyoto University)

https://doi.org/10.7567/SSDM.2000.A-3-3