[A-3-5] Suppression of Storage Node Contact Distortion for Gigabit-Scale DRAM with COB Structure

D. H. Kim、H. Jeoung、H. S. Kim、J. H. Park、K. H. Yeom、S. Y. Kim、J. M. Park、T. K. Kim、J. S. Kim、D. K. Park、Y. J. PARK、J. W. PARK (1.Semiconductor R&D Center, Samsung Electronics Co., Ltd.)

https://doi.org/10.7567/SSDM.2000.A-3-5