The Japan Society of Applied Physics

[A-4-1] Optimisation of CoSi2 Based Electrical Fuses for Redundancy Implementation in Sub-0.13 μm Embedded DRAM Applications

C. Kothandaraman、Sundar K. Iyer、J. J. Wu、Subramanian S. Iyer (1.Infineon Technologies Corp.、2.IBM Microelectronics, Semiconductor R&D centre)

https://doi.org/10.7567/SSDM.2000.A-4-1