[A-6-5] Impurity Measurement in Specialty Gases Using Atmospheric Pressure Ionization Mass Spectrometer with Two Compartments Ion Source

Masafumi Kitano, Yasuyuki Shirai, Atsushi Ohki, Tadahiro Ohmi (1.New Industry Creation Hatchery Center, University of Tohoku, 2.Osaka Sanso Kogyo Limited)

https://doi.org/10.7567/SSDM.2000.A-6-5