[B-1-1] Deuterium Effect on Both Interface-State Generation and Stress-Induced-Leakage-Current under Fowler-Nordheim Electron Injection

Yuichiro Mitani、Hideki Satake、Hitoshi Ito、Akira Toriumi (1.Advanced LSI Technology Laboratory, Toshiba Corp.)

https://doi.org/10.7567/SSDM.2000.B-1-1