[B-3-2] Quantitative Evaluation of Quantum Mechanical Influence on Flat-Band Capacitance of Poly-Si/SiO2/Si Substrate System and the Impact of Oxide Charge Density

Akira SHIMIZU, Yasuhisa OMURA (1.High-Technology Research Center and Faculty of Engineering, Kansai University)

https://doi.org/10.7567/SSDM.2000.B-3-2