[B-6-7] Microscopic Observation of X-Ray Irradiation Damages in Ultra-Thin SiO2 Films

Kenji Ohmori, Tomokazu Goto, Hiroya Ikeda, Akira Sakai, Shigeaki Zaima, Yukio Yasuda (1.Venture Business Laboratory, Nagoya University, 2.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, 3.Center for Cooperative Research in Advanced Science & Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2000.B-6-7