Non-Equilibrium Structures of Si/SiO2 and Si/SiOxNy Interfaces

Jiro Ushio; Jurgen Schulte; Takuya Maruizumi

doi:https://doi.org/10.7567/SSDM.2000.B-7-1

2000 International Conference on Solid State Devices and Materials

Aug 29, 2000 - Aug 31, 2000
Sendai International Center, Sendai, Japan

[B-7-1] Non-Equilibrium Structures of Si/SiO2 and Si/SiOxNy Interfaces

Jiro Ushio, Jurgen Schulte, Takuya Maruizumi (1.Advanced Research Laboratory, Hitachi, Ltd., 2.Department of Applied Physics, University of Technology)

https://doi.org/10.7567/SSDM.2000.B-7-1

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