[B-7-1] Non-Equilibrium Structures of Si/SiO2 and Si/SiOxNy Interfaces

Jiro Ushio、Jurgen Schulte、Takuya Maruizumi (1.Advanced Research Laboratory, Hitachi, Ltd.、2.Department of Applied Physics, University of Technology)

https://doi.org/10.7567/SSDM.2000.B-7-1