[B-8-1] Ion Irradiation Stimulated Crystal Nucleation in Amorphous Si on SiO2

Masanobu Miyao, Isao Tsunoda, Taizoh Sadoh, Atsushi Kenjo (1.Department of Electronic Device Engineering, Kyushu University)

https://doi.org/10.7567/SSDM.2000.B-8-1