[B-8-4] Simple Process for Buried Nanopyramid Array (BNPA) Fabrication by Means of Dopant Ion Implantation and Dual Wet Etching

M. Koh, T. Goto, T. Iida, A. Sugita, T. Tanii, T. Shinada, T. Matsukawa, I. Ohdomari (1.Kagami Memorial Laboratory for Materials Science and Technology, Waseda University, 2.School of Science and Engineering, Waseda University, 3.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.2000.B-8-4