[B-9-6] Conformal Platinum Electrodes Prepared by Chemical Vapor Deposition Using a Liquid MeCpPtMe3 Precursor in an Oxidizing Atmosphere

Yuichi Matsui, Masahiko Hiratani, Toshihide Nabatame, Yasuhiro Shimamoto, Kazushige Imagawa, Shinichiro Kimura (1.Central Research Laboratory, Hitachi, Ltd, 2.Hitachi Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.2000.B-9-6