Conformal Platinum Electrodes Prepared by Chemical Vapor Deposition Using a Liquid MeCpPtMe3 Precursor in an Oxidizing Atmosphere

Yuichi Matsui; Masahiko Hiratani; Toshihide Nabatame; Yasuhiro Shimamoto; Kazushige Imagawa; Shinichiro Kimura

doi:https://doi.org/10.7567/SSDM.2000.B-9-6

[B-9-6] Conformal Platinum Electrodes Prepared by Chemical Vapor Deposition Using a Liquid MeCpPtMe3 Precursor in an Oxidizing Atmosphere

Yuichi Matsui、Masahiko Hiratani、Toshihide Nabatame、Yasuhiro Shimamoto、Kazushige Imagawa、Shinichiro Kimura (1.Central Research Laboratory, Hitachi, Ltd、2.Hitachi Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.2000.B-9-6

2000 International Conference on Solid State Devices and Materials

[B-9-6] Conformal Platinum Electrodes Prepared by Chemical Vapor Deposition Using a Liquid MeCpPtMe3 Precursor in an Oxidizing Atmosphere