[C-4-1] SPM Studies of Hydrogen-Induced Degradation of Pt/PLZT/Pt Capacitors

Chikako Yoshida, Tetsuro Tamura, Kazuaki Kondo, Kanetake Takasaki (1.Fujitsu Limited, 2.Fujitsu Laboratories Limited)

https://doi.org/10.7567/SSDM.2000.C-4-1